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El-Mul's 3Max concept brings exciting new life to the Everhart-Thornley (ET) detection scheme.
The unique design can be operated in two modes:
> SE3 only mode enables the imaging of low energy BSE (250 eV and less) signals. This mode detects SE3 generated by BSE impinging on chamber walls and components. Excellent material contrast imagery can be obtained when low-energy BSE cannot be otherwise detected.
> SE+SE3 mode collects electrons from a large space, improving SNR up to x3 relative to standard ETD. When very low beam currents must be used, this mode will generate the optimal image.
Occupying a single ETD port, 3Max can be easily adapted and optimized for a specific chamber.
The unique design can be operated in two modes:
> SE3 only mode enables the imaging of low energy BSE (250 eV and less) signals. This mode detects SE3 generated by BSE impinging on chamber walls and components. Excellent material contrast imagery can be obtained when low-energy BSE cannot be otherwise detected.
> SE+SE3 mode collects electrons from a large space, improving SNR up to x3 relative to standard ETD. When very low beam currents must be used, this mode will generate the optimal image.
Occupying a single ETD port, 3Max can be easily adapted and optimized for a specific chamber.
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